Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Flexure-based mechanisms have been widely used for scanning tunneling CRICKET PROTEIN VANILLA microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation.In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed.The designed monolithic manipulator has three degrees of freedom (D